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Is there a standard, a good book or an article, which could be used as a guide to improve ESD control in semiconductor fabrication (wafer fabrication in cleanroom)? - Anonymous, Espoo, Finland
Answer
The Institute of Environmental Sciences: 940 East Northwest Highway Mount Prospect, IL 60056; Ph: (847) 255-1561; Fx: (847) 255-1699; which publishes many standards/documents on clean rooms, and in particular, IES-RP-CC022.1, Electrostatic charge in cleanrooms and other controlled environments, 1992. There are a slew of other standards relative to cleanrooms from various military standards, FED-STD-209E, MIL-STD-1246C, etc. and the American Society for Testing and Materials (ASTM):1916 Race Street Philadelphia, PA 19103-1187; Ph: (215) 299-2632; Fx: (215) 977-9679
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